Atomic Layer Deposition of Nanostructured Materials
PART I: Introduction to ALDTHEORETICAL MODELING OF ALD PROCESSESIntroductionOverview of Atomistic SimulationsCalculation of Properties Using Quantum SimulationsPrediction of ALD Chemical Mechanis
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Specifikacia Atomic Layer Deposition of Nanostructured Materials
PART I: Introduction to ALDTHEORETICAL MODELING OF ALD PROCESSESIntroductionOverview of Atomistic SimulationsCalculation of Properties Using Quantum SimulationsPrediction of ALD Chemical Mechanis